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发明名称
METHOD OF SPIN DRYING AND DEVICE THEREOF
摘要
申请公布号
JPH08191057(A)
申请公布日期
1996.07.23
申请号
JP19950000853
申请日期
1995.01.06
申请人
HITACHI CABLE LTD
发明人
KOMATA CHIKAFUMI
分类号
F26B5/08;F26B11/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
F26B5/08
代理机构
代理人
主权项
地址
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