| 摘要 |
PURPOSE: To form a device suited for forming a block and enhance the efficiency of cooperating with an auxiliary equipment by providing a control soft in each block of a load/unload block, conveying block, polishing block and a washing block. CONSTITUTION: A load/unload block 5, conveying block 6, polishing block 7, washing block 8 and a control block of controlling each of these blocks are respectively independently arranged on a common base. In each device of an abrasive fluid supplier 31, waste fluid processor 32, cooling water supplier 33 and a warm water supplier 34 which are auxiliary equipment, cooperative action is controlled through a control device of the respective device by a signal output from the control block and by an associated control soft additionally provided in a control soft. |
