发明名称 Bottom gate mask ROM device
摘要 A semiconductor device includes a semiconductor substrate doped with a first conductivity type. The substrate has a surface, with a parallel array of word lines ion implanted as regions in the surface of said substrate. The N+ word lines are of the opposite conductivity type from the P- substrate. A dielectric layer, formed on the substrate above the word lines, is covered with a polysilicon layer doped with a P- conductivity type. A second dielectric layer covers the polysilicon layer. A parallel array of N+ conductivity regions form doped N+ bit lines in the polysilicon layer. Above the N+ bit lines are formed alternating strips of planarized silicon nitride separated by silicon dioxide strips which are covered by a BPSG layer. An etched code pattern is formed extending through the polysilicon layer in a predetermined region providing an encoded RON.
申请公布号 US5539234(A) 申请公布日期 1996.07.23
申请号 US19940363950 申请日期 1994.12.27
申请人 UNITED MICROELECTRONICS CORPORATION 发明人 HONG, GARY
分类号 H01L21/8246;(IPC1-7):H01L27/112;H01L21/76 主分类号 H01L21/8246
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