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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08191052(A)
申请公布日期
1996.07.23
申请号
JP19950016461
申请日期
1995.01.07
申请人
SONY CORP
发明人
YAMAGUCHI KAZUHISA
分类号
H01L21/22;H01L21/265;H01L21/324;(IPC1-7):H01L21/265
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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