| 摘要 |
A device comprising a flat susceptor (14) rotating parallel to a reference surface (30) about a rotary shaft (20) perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the integrated ferromagnetic elements (11) in the susceptor, by the rotary shaft, by the reference surface with grooves or depressions (60, 62), by a magnetic actuating assembly of magnetic solenoids (74), by a gas inlet (40), by control electronics (80), and by optional sensors (82).
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