Verfahren und Vorrichtung zur Bestimmung der Schichtdicke, der Leitfähigkeit und/oder der Schichtkontaktgüte von auf Substraten aufgetragenen Schichten

摘要

The invention relates to a process for determining the layer thickness(es), the heat conductivity(ies) and/or the layer contact quality of layers or layer systems deposited on substrates using photo-thermal means, in which light is directed on the layer to be measured and the time-dependent temperature rise, temperature drop and/or the maximum amplitude is measured photo-thermally by a detector.