| 摘要 |
<p>A magnetic assembly for a cylindrical magnetron is designed such that the racetrack (11) has an end section (12) shaped in a parabola, semi-ellipse, or triangle so as to reduce the erosion of the cylindrical target at the end portions. In this manner, the magnetic field at the ends of the racetrack need not be significantly reduced and the efficiency of the magnetron can be maintained.</p> |
