| 发明名称 |
APPARATUS FOR GENERATING PLASMA BY PLASMA-GUIDED MICROWAVE POWER |
| 摘要 |
An apparatus and method for generating a plasma (10) within a volume (2) containing a mixture of gaseous species. To generate the plasma, at least one large area applicator (1), which is a part of this invention, is employed. At least one microwave generator (5) introduces microwave power into the applicator (1) by means of suitable waveguides (20) and couplers (22).
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| 申请公布号 |
WO9621751(A1) |
申请公布日期 |
1996.07.18 |
| 申请号 |
WO1996US00399 |
申请日期 |
1996.01.11 |
| 申请人 |
DEPOSITION SCIENCES, INC. |
发明人 |
BOLING, NORMAN, L. |
| 分类号 |
H05H1/46;C23C14/54;C23C14/56;C23C16/50;C23C16/511;H01J37/32;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C16/00;C23F1/02;C23C14/00 |
主分类号 |
H05H1/46 |
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