发明名称 LASER MARKING SYSTEM AND LASER MARKING METHOD USING THE SAME
摘要 A laser marking system and a laser marking method using the same are provided to measure power of a laser beam in real time by using a power maintenance unit employing a photodiode. A laser marking system comprises a laser oscillator(10), a laser beam transfer unit, and a power maintenance unit. The laser oscillator generates a laser beam(1). The laser beam transfer unit guides and projects the laser beam emitted from the laser oscillator, onto a substrate(2) for marking. The power maintenance unit for maintaining the laser beam power at a constant level, comprises a beam splitter splitting the laser beam of incident light into a laser beam for marking(1a) and a laser beam for power measurement, a photodiode(120) receiving the laser beam for power measurement and outputting a voltage corresponding to the power of the leaser beam for power measurement, a controller(130) adjusting the power of the laser beam emitted from the laser oscillator according to the output voltage of the photodiode, and a diffuser lens installed between the beam splitter and the photodiode, for diffused reflection of the laser beam for power measurement, allowing the laser beam to enter the photodiode uniformly.
申请公布号 KR20080024396(A) 申请公布日期 2008.03.18
申请号 KR20060088699 申请日期 2006.09.13
申请人 EO TECHNICS CO., LTD. 发明人 KIM, KI HYUCK;CHOI, CHANG GI;LEE, SANG GIL;KIM, NAM SEONG
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址