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发明名称
FILM FORMING APPARATUS
摘要
申请公布号
JPH08186107(A)
申请公布日期
1996.07.16
申请号
JP19940338995
申请日期
1994.12.29
申请人
SONY CORP
发明人
AJISAWA HARUHIKO;ENOMOTO YASUYUKI;SAITO MASAKI
分类号
C30B25/14;C23C16/44;C23C16/455;H01L21/205;H01L21/316;(IPC1-7):H01L21/316
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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