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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08186168(A)
申请公布日期
1996.07.16
申请号
JP19950067220
申请日期
1995.03.27
申请人
ROHM CO LTD
发明人
MATSUMOTO MUNEYUKI
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
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