| 摘要 |
PURPOSE: To provide an angular velocity sensor for detecting the angular velocities around two different axes with improved sensitivity. CONSTITUTION: A plane vibrator 3 is a connected body where a weight vibrator 5 is connected to the inside of a frame body 6 of a right-angle quadrilateral through a connection beam 4 and is supported by a support beam 8 which is bent and formed so that it can be vibrated in x and y directions. Traveling electrodes 11A and 11B which become excitation electrodes and traveling electrodes 10A and 10B which become angular velocity detection electrodes around z axis protrude at the outer edges of four sides of the frame body 6. The resonance frequency of the vibration in x and y directions of the plane vibrator 3 is adjusted to nearly match that in the vibration of z direction of the weight vibrator 5. Therefore, when the Coriolis force in z direction is applied to the plane vibrator 3 due to the rotation around x axis, only the weight vibrator 5 vibrates in z direction to detect the angular velocity around x axis. Also, in the case of rotation around z axis, a servo mechanism 18 is driven and the frame body 6 does not actually move in x direction, thus detecting the angular velocity around z axis based on the output voltage of the servo mechanism 18. |
