| 摘要 |
PURPOSE: To enhance throughput in the test of semiconductor by simplifying the rout for transferring a test pattern in a semiconductor tester thereby shortening the data transfer time. CONSTITUTION: A test controller 13 is provided with an I/F 13a for transferring the test pattern 100 of an EWS 12, on one hand, through an I/F 13a and interfacing a data directly at the I/F 14a of a butter memory 14 and interfacing the data transfer, on the other hand, through a test controller 13. |
