| 摘要 |
PURPOSE: To utilize a SQUID by a method wherein an oxide superconducting film on a flexible base body is patterned, the base body is cut and bent, a coil is formed and a superconducting face is pressed to the input side. CONSTITUTION: A YBCO thin film is etched by a photographic exposure operation and an acid, an STO film is left, a linear pattern is formed, and a pattern for a linear differential coil is manufactured. In addition, gold is vapor-deposited, in 10nm, on the terminal part of a pickup coil, a silver tape is bent to be a cylindrical shape, and the linear differential coil 26 is formed. A SQUID chip is fixed to a copper holder 32, and the pickup coil is fixed onto it in such a way that the terminal part of the linear differential pickup coil 26 is overlapped with the terminal part of an input coil. After that, the terminal parts are pressed by a pressure jig 33 from the silver face of the pickup coil, both are brought into contact in a state that the silver tape has been deformed, and the superconducting connection of the input coil to the pickup coil for a SQUID can be realized even after a cooling operation and a temperature rise operation have been repeated. |
