| 摘要 |
PURPOSE: To realize a highly accurate temperature measurement by inputting/ outputting electric signal using an unused lead except those having temperature measuring function of a semiconductor element and imparting a function for recognizing an individual to each semiconductor element, thereby eliminating the individual difference of a chip to be used. CONSTITUTION: When a plurality of ICs are measured simultaneously at a measuring section 6, for example, the voltage value 12 (a1) at a measuring point A is delivered, as a measurement 13 (x1), to a converting section 11 through a voltage measuring section 10. The individual recognition voltage 18 (b1) at the measuring point A is converted at an ID individual recognition section 18 and delivered, as an individual recognition value 19 (y1), to the converting section 11. The individual recognition value 19 (y1) inputted to the converting section 11 is specified along with a conversion function for each IC being measured previously and stored in a memory. The measurement 13 (x1) at each measuring point is then converted using the specified conversion function and outputted as a temperature value 14 (z1). |
