| 摘要 |
PURPOSE: To provide a stage apparatus in which the own weight deflection of a plate can be alleviated. CONSTITUTION: The stage apparatus comprises a support pin for sucking to support a board P on a board stage, and a conveying arm 14 to support the board P to receive and deliver it from and to a board stage support pin. The pins are substantially concentrically disposed at a plurality of groups 4a, 4b, and an elevating motion and board sucking and releasing motions can be independently controlled at each group. Thus, since the supporting height and the sucking and releasing timings of the plate P can be altered at each of the groups 4a, 4b, the own weight deflection and intrinsic warpage of the plate P can be suppressed to the minimum limit while suppressing a stress to be given to the plate P. |
