| 摘要 |
PURPOSE: To provide an elementary analysis method by a scanning type probe microscope to observe the surface atom of an article to be measured by combining the high spatial resolving power of a scanning type probe microscope, an element analyzing method by an Auger electron spectroscopic method or an energy analyzing method of a photon generated by the irradiation with high energy electrons and a chemical bond state analyzing method. CONSTITUTION: Operation is performed or temporarily stopped under the original conditions as the scanning type probe microscope to apply AC or DC ultra-short pulse high voltage singly or repeatedly so as to discharge photons or Auger electrons from an article 13 to be measured between a probe 14 and the article 13 to be measured. The probe 14 and the article 13 to be measured are relatively moved during or after the application to scan the surface of the article 13 to be measured by the probe 14 not only to obtain the atom-order image of the surface of the article to be measured but also to analyze the energy of the photons or Auger electrons discharged from the surface of the article to be measured, the number of photons and the number of electrons. |
