MANUFACTURING METHOD AND DEVICE, AND PREFORM OF CANTILEVER FOR NEAR-FIELD SCANNING OPTICAL MICROSCOPE

摘要

PURPOSE: To provide a cantilever for a near-field scanning optical microscope having a probe with a microopening at its end and incorporating an atomic force microscope. CONSTITUTION: A holding means 210 by which the probe of a preform 126' is supported while being opposite to a counter electrode 208 is provided. The counter electrode 208 is replaceably fixed on a counter electrode holding means 206 fixed to a vertically moving stage 204, and its distance to the probe is adjustable. In order to monitor that interval, an optical-lever type displacement measuring means consisting of a laser beam source 212 and a two-piece photodetector 214 is provided. The counter electrode 208 is connected to a voltage source 216, and the conductive light-blocking coating of the preform 126' is connected to the voltage source 216 via a current detection means 218 and a switch 224. The current detection means 218 comprises a resistance 220 and a voltmeter 222. A capacitor 226 is provided between the conductive light- blocking coating and the counter electrode 208.