| 摘要 |
PURPOSE: To provide a board carrying control method wherein board carrying can be started and stopped with step operation unit, carrying start operation after restoration of trouble generation time during carriage can be reduced, the carrying throughput is improved by the effect of step management of carrying time, and the improvement of throughput of a semiconductor manufacturing equipment is realized. CONSTITUTION: A carrying operation wherein a board is carried from a chamber to the next chamber by using a board carrying equipment is divided into a plurality of steps. Whether the command of carriage pause is present is judged in each step. When the command of carriage pause is present, carrying is interrupted at the step. When abnormality happens in the way of carrying, abnormal ending is performed at the step unit. |
