发明名称 ELECTROPHOTOGRAPHIC PHOTORECEPTOR AND ITS MANUFACTURE
摘要 PURPOSE: To provide the manufacturing method of the electrophotographic photoreceptor capable of forming a high-quality image superior in electric characteristics. CONSTITUTION: The electrophotographic photoreceptor provided on a conductive substrate with at least a charge injection hindrance layer made of an amorphous material composed essentially of silicon atoms and a photoconductive layer is manufactured by changing, at the time of forming the photoconductive layer, the feed of a gaseous material for forming the silicon atoms in a rate of 0.29-12 sccm/sec and the feed of a diluting gas in a rate of 2.2-73sccm/sec, a discharge power of 0.7-27W, and an inside pressure of 0.33-13μTorr.
申请公布号 JPH08179536(A) 申请公布日期 1996.07.12
申请号 JP19940325410 申请日期 1994.12.27
申请人 CANON INC 发明人 SEKI YOSHIO;SHIRASAGO TOSHIYASU;KATAGIRI HIROYUKI
分类号 G03G5/08;C23C16/24;C23C16/50;H01L21/205;(IPC1-7):G03G5/08 主分类号 G03G5/08
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