| 摘要 |
PURPOSE: To accurately and efficiently measure the number of radiated ions for not only the inactive gas ions but also the active gas ions such as nitrogen gas ions or oxygen gas ions. CONSTITUTION: A secondary electron suppressing electrode G2 and a limiting electrode G3 are provided in the front of a collecting electrode G1 connected to a current measuring means and collecting ions. A Faraday cup measures the number of ions of the ion beam radiated to the collecting electrode G1, and the collecting electrode G1 is made of a material selected from a group of nickel (Ni), platinum (Pt), and gold (Au) at least on the face radiated with ions.
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