| 摘要 |
<p>PURPOSE: To reduce the types and the number of change kits by providing multiple sets of measured IC device storage holes different in outer shape and depth size in multiple stages on the same plane of a plate-like substrate. CONSTITUTION: Multiple sets of measured IC device storage holes 2 different in outer shape and depth size are provided in multiple stages on the same plane of a plate-like substrate 3. One change kit l can be used for the measuring work of measured IC devices of multiple types. The replacing time for the change kit 1 becomes at least 1/2 or below, the availability factor of an IC tester can be improved, the number of the change kits 1 is reduced, and the manufacturing cost and the storage space cost can be reduced.</p> |
