CORROSION RESISTANCE ALUMINUM ARTICLE FOR SEMICONDUCTOR PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To avoid corrosion of an aluminum article by making the article of a high purity aluminum - magnesium alloy containing magnesium optimally. SOLUTION: A magnesium halide protective layer 512 is formed on an aluminum article 510. Content of magnesium in the aluminum article 510 is set in the range of 0.1-1.5 wt.% over the entire article or at least over the area beneath the surface of the article which must be corrosion resistant. Content of impurities in the aluminum is 0.2% or less. Concentration of magnesium is set within the optimal range and the article is exposed to chemical species containing halogen thus forming a protective layer 512. Furthermore, an upper layer 514 is formed of an aggregate material by anodic processing thus avoiding corrosion of the aluminum article.