| 摘要 |
PURPOSE: To expedite the supply of steam to a board and to shorten the time required to remove remaining oxygen by increasing the surface area of a ceramic circuit board in contact with baking atmosphere in the step of baking a ceramic multilayer circuit board. CONSTITUTION: A board 1 is placed on a setter 2 made of a ceramic plate, a metal plate or a porous plate. Vent holes 3 on a lattice are provided at the setter 2. Since wet nitrogen of the atmosphere is brought into contact with the surface of the lower side of the board via the holes, the steam is also supplied from the lower surface of the board. Further, when the porous material having the holes is used as the setter, even if the holes are not brought into contact with the board, the diffusing distance of the steam in the porous setter is shortened, and the steam supply via the setter is expedited. Thus, the time required for removing the remaining carbon in the remaining carbon removing step can be shortened. |
