| 摘要 |
PURPOSE: To miniaturize a micromotion device by providing an electro/ mechanical conversion element which carries a mass body having a prescribed mass and firmly sticks to one surface of the element in the width direction and generates a shearing strain when a voltage is applied across the element from the thickness direction. CONSTITUTION: A moving body 1, electro/mechanical conversion element 3, and mass body 3 having a prescribed mass are piled up upon another and firmly stuck to each other so that the element 2 can be interposed between the moving body 1 and mass body 3, with the lower and upper surfaces of the element 2 being respectively firmly stuck to the upper surface of the moving body 1 and lower surface of the mass body 3. When a voltage is applied across the laminated body from a voltage control circuit 4, shearing stresses corresponding to the voltage are generated in five rotational directions around two axes and both end sections of the element 2 are distorted by ε. Since the platy moving body 1, element 2, and mass body 3 are piled up one upon another, the length, width, and height of a micromotion device thus constituted can be reduced and, accordingly, the size of the device can be reduced. |
