ELECTRON BEAM SOURCE, MANUFACTURE THEREOF, ELECTRON BEAM SOURCE APPARATUS AND ELECTRON BEAM APPARATUS USING THEREOF

摘要

PURPOSE: To provide an electron beam source which can generate electron beam of a unicolor and high brightness. CONSTITUTION: An electron forming means, e.g. a doped Si layer 2, to generate electrons in a conduction band is formed near the tip surface of a needle like structure 1 having a sharp tip part and made of a substance at least the surface of which is a semiconductor single crystal or single crystal insulating substance. It is preferable to form a surface passivation layer 4 on the surface of the needle-like structure 1. Furthermore, a means to excite electrons in a valence electron band may be formed instead of the doped Si layer 2.