| 摘要 |
<p>A method of manufacturing a radiotransparent window. In order to achieve suitable radiation transmission, notably for long-wave X-rays, the window is made of a material containing exclusively light elements such as carbon and hydrogen. This material is deposited on a metal or semiconductor substrate, for example of silicon, after which the window material is exposed to such a dose of ion bombardment that the material is converted into glassy carbon. This carbon modification can be realised in very thin layers and is chemically very resistant, so that it can serve very well as an etching stop for etching off (a part of) the substrate material.</p> |
