发明名称 Verfahren zum Bekeimen eines Substrats zur späteren Herstellung einer Komposit-Struktur
摘要 A composite structure having a substantially monocrystalline growth substrate and at least one monocrystalline or polycrystalline layer of diamond or diamond-like material arranged on a surface of the growth substrate, the surface of the growth substrate being provided with crystal growth nuclei having crystal axes which exhibit an inclination of not more than 10%, preferably not more than 7%, with respect to corresponding axes of the crystal lattice of the growth substrate, and a process for producing such a composite structure in which the growth substrate is pretreated and growth nuclei are deposited from a nucleating gas phase of known composition for depositing layers of diamond or diamond-like material, in which during the nucleation the growth substrate is raised to a negative electrical potential relative to the nucleating gas phase.
申请公布号 DE4427714(C2) 申请公布日期 1996.07.11
申请号 DE19944427714 申请日期 1994.08.05
申请人 DAIMLER-BENZ AKTIENGESELLSCHAFT, 70567 STUTTGART, DE 发明人 STUBHAN, FRANK, 89584 EHINGEN, DE;FUESER, HANS-JUERGEN, DR., 89547 GERSTETTEN, DE;FERGUSON, MONA, DR., 89081 ULM, DE
分类号 C23C16/02;C23C16/27;H01L21/205;(IPC1-7):H01L21/205;C30B25/18;C30B29/04;C23C16/26;C30B25/10 主分类号 C23C16/02
代理机构 代理人
主权项
地址