发明名称 Sealable container
摘要 Our invention is a sealable container (1) for accommodating semiconductor wafers (W), comprises a hallow main body (5) having an opening (6) for taking said semiconductor wafers (W) out or into, a lid member (9) for plugging said opening (6), a lock means (10) for locking and releasing said lid member (9) in said opening (6) of said main body (5), and a pressure-equalizing mechanism (11) for keeping an interior in said main body (5) airtight or allow an interior in said main body (5) to be communicable with an exterior in co-operation with said lock means (10). <IMAGE>
申请公布号 EP0721207(A2) 申请公布日期 1996.07.10
申请号 EP19960100172 申请日期 1996.01.08
申请人 SHINKO ELECTRIC CO. LTD. 发明人 MURATA, MASANAO;TANAKA, TSUYOSHI;MORITA, TERUYA
分类号 B65D81/20;B01D46/00;H01L21/02;H01L21/673;(IPC1-7):H01L21/00 主分类号 B65D81/20
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