摘要 |
Our invention is a sealable container (1) for accommodating semiconductor wafers (W), comprises a hallow main body (5) having an opening (6) for taking said semiconductor wafers (W) out or into, a lid member (9) for plugging said opening (6), a lock means (10) for locking and releasing said lid member (9) in said opening (6) of said main body (5), and a pressure-equalizing mechanism (11) for keeping an interior in said main body (5) airtight or allow an interior in said main body (5) to be communicable with an exterior in co-operation with said lock means (10). <IMAGE>
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