| 摘要 |
FIELD: vacuum engineering; evacuation and leakage-detection facilities. SUBSTANCE: pump has extended adsorbing surfaces forming forevacuum cavity 11 and high-vacuum cavity 12 sorbing with the former. To form these cavities, use is made of adsorbent 14 on vessel 3 with cooling agent 4, cooled cryogenic panel 7 with adsorbents 9 and 10 attached on two sides, and sleeve 5 with fixed adsorbent 6. Gases admitted to pump are adsorbed as they flow over pumping-out cavities, and hardly adsorbed gases, such as helium, hydrogen, neon, are admitted to cavity of housing 1 and evacuated by means of external high-vacuum pump. This ensures low partial pressure of helium and other gases during forevacuum pumping already. EFFECT: reduced evacuation time, for example, during leakage detection by using mass-spectrometer method; increased maximum vacuum when pump runs as cryoadsorbing trap due to physical elongation of pumped gases molecular path between extended absorbing surfaces. 3 cl, 1 dwg |
