METHOD AND APPARATUS FOR PLASMA TREATMENT OF PIECES,申请号RU19930030148-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PLASMA TREATMENT OF PIECES
摘要
申请公布号	RU2063472(C1)	申请公布日期	1996.07.10
申请号	RU19930030148	申请日期	1993.06.11
申请人	BOGATOV VALERIJ A;MARAKHTANOV MIKHAIL K;KHOKHLOV YURIJ A	发明人	BOGATOV VALERIJ A;MARAKHTANOV MIKHAIL K;KHOKHLOV YURIJ A
分类号	C23C14/00;C23C14/35;H01J17/02;(IPC1-7):C23C14/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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