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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH08176855(A)
申请公布日期
1996.07.09
申请号
JP19940323351
申请日期
1994.12.26
申请人
NISSIN ELECTRIC CO LTD
发明人
MATSUDA KOJI;SASAMURA YOSHITAKA
分类号
H05H1/46;C23C16/50;C23F4/00;H01L21/302;(IPC1-7):C23F4/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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