| 摘要 |
A vertical boat comprises a plurality of rods extending vertically in parallel from a base. Each rod has a plurality of slots cut along the length of the respective rod. The slots of each rod are vertically aligned with the slots of the other rods and have top and bottom surfaces that are peaked. The rods are arranged so that a wafer can be jointly received by a corresponding slot from each rod, thereby allowing the boat to hold the wafers in a stack with both sides of the wafers exposed.
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