| 摘要 |
PURPOSE: To provide a method and device for controlling all kinds of assist gases for laser machining without using an expensive flow rate control device by controlling pressure or mass flow rate with a pressure command. CONSTITUTION: The pressure or mass flow rate of an assist gas selected from a plurality of assist gasses is controlled by means of a proportional control valve 11; also, a control circuit from the proportional control valve 11 to a discharge part 25 is branched into a pressure command control circuit 15 and a flow rate command control circuit 17; and the assist gas is discharged from the discharge part 25. The pressure command control circuit 15 is made a bypass circuit; the pressure is controlled through the feedback of a pressure value from a pressure sensor 41 provided in the discharge part 25 to control devices 43, 45; and the flow rate is controlled through the feedback of a flow rate from a mass flow rate sensor 35 provided in the flow rate command control circuit 11 to the control devices 43, 45. |
