| 摘要 |
PURPOSE: To provide a method and device by which a film is uniformly formed on the inner periphery even for a small-inner-diameter shell and capable of obtaining a shell with a film formed on its inner periphery with good productivity. CONSTITUTION: A rod-shaped electrode 2 is set in a vacuum vessel 1, an annular electrode 3 is set around the electrode 2, a rod-shaped sputtering target 5 to be impressed with power is arranged on the extension line of the electrode 2, and a shell S1 to be coated with film is arranged around the target 5 almost in alignment with the annular electrode 3. The vessel 1 is evacuated to a specified vacuum, a plasma source gas is introduced between the electrodes 2 and 3, a power to convert the gas to plasma is impressed, and further a magnetic field is impressed. The plasma thus produced is introduced into the shell S1, a voltage is impressed on the target 5, hence the target 5 is sputtered, and a film is formed on the inner face of the shell S1. A shell with a film formed on its inner periphery is produced with this device. |
