THIN-FILM PIEZOELECTRIC ELEMENT, PROCESS FOR PREPARING THE SAME, AND INK JET RECORDING HEAD MADE BY USING SAID ELEMENT

摘要

A thin-film piezoelectric element comprising a piezoelectric film formed of a polycrystalline material and two electrodes sandwiching the film therebetween, wherein the piezoelectric film comprises a three-component PZT having a third component content of 5 % by mole or more, has a thickness of not more than 5 mu m, and has a variation in Pb component of not more than +/- 5 % in the direction of thickness. It has good properties. Specifically, the use of the thin-film piezoelectric element enables a reduction in size of an ink jet recording head and an increase in resolution of ink jet recording. Further, the piezoelectric element can advantageously eject an ink at a high pressure and can be driven at a high frequency.