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发明名称
Vorrichtung zur Erzeugung eines Plasmas durch Mikrowellen
摘要
申请公布号
DE3905303(C2)
申请公布日期
1996.07.04
申请号
DE19893905303
申请日期
1989.02.21
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
OKAMOTO, YUKIO, SAGAMIHARA, JP
分类号
H01J49/10;H05H1/46;(IPC1-7):H05H1/46;H01J27/16;H05H1/30;H05H1/40
主分类号
H01J49/10
代理机构
代理人
主权项
地址
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