Acoustic transducer

摘要

Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.

主权项

1. An acoustic transducer, comprising:
a substrate; a chamber in the substrate; a first electrode suspended above the chamber, the first electrode including:
a first rectangular portion having a first area and including a plurality of first anchor regions;a second rectangular portion having a second area, the second area being smaller than the first area, the second rectangular portion extending from a first side of the first rectangular portion and the second rectangular portion being separated from the first rectangular portion by a first thin opening, the second area including second anchor regions, each second anchor region being greater in area than one of the first anchor regions, each second region being greater in area than one of the first anchor regions.