ELEMENTARY ANALYSIS METHOD BY SCANNING PROBE MICROSCOPE AND ULTRA-SHORT PULSE HIGH-VOLTAGE APPLICATION METHOD USED FOR SAID METHOD

摘要

The present invention makes it possible to conduct the determination of the three-dimensional coordinates of the atomic nucleus for each surface atom of a sample, elementary analysis and analysis of the chemical bond state by combining high spatial resolution of a scanning probe microscope with an Auger electron spectroscopy or an elementary analysis method by an energy analysis method of photons generated by high energy electron irradiation and a chemical bond state analysis method. An A.C. or D.C. ultra-short pulse high voltage is applied either singly or repeatedly between a probe and a sample during the operation of a scanning probe and a sample during the operation of a scanning probe microscope under its original operation condition or while the operation of the microscope is suspended temporarily, so as to excite core electrons of the sample or valence electrons distributed spherically and symmetrically with the atomic nucleus as the center, and energy analysis and counting analysis are carried out for the photons or the Auger electrons thereby emitted so as to decide the three-dimensional coordinates of the atomic nucleus of each surface atom of the sample and to measure surface distribution relating to the elementary analysis and the chemical bond state analysis, and to obtain atomic images containing the elements and chemical bond information.