CARRYING METHOD AND BONDING APPARATUS

摘要

According to a transfer method, a laminate (40) is directly transferred from a first robot arm (10) transferring the laminate (40) from a bonding chamber (7) to a polymerization chamber (6) to a second robot arm (4) taking out the laminate (40) from the polymerization chamber (6) to the outside. The transfer method can prevent unintentional softening of the bonding layer which enables a substrate and a support body to be bonded.