| 发明名称 |
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| 摘要 |
PURPOSE:To obtain a holding tool such as a bracket or the like which is chemi cally stable and whose dimensional accuracy and stability are high by performing injection-molding of a polyallylene sulfide resin represented by a polyphenylene sulfide resin. CONSTITUTION:A holding tool 1 for wafer handling use is formed by injection- molding a material which is composed mainly of a polyallylene sulfide resin and with which small mounts of other resins have been mixed within a range not obstructing its object. Its shape is of a basket type which can align and hold many wafers 3 in a noncontact manner, which can insert and take out them smoothly and in which not only the upper part but also the bottom or side faces are open; it is preferably a structure form which is provided with ribs 2 or the like so as to fit the wafers accurately. |
| 申请公布号 |
JP2513848(B2) |
申请公布日期 |
1996.07.03 |
| 申请号 |
JP19890186629 |
申请日期 |
1989.07.19 |
| 申请人 |
HORIPURASUCHITSUKUSU KK;SEEKON SEISAKUSHO KK |
发明人 |
KURATA SHIGEATSU;KON TOKUO |
| 分类号 |
C08G75/02;H01L21/673;H01L21/68 |
主分类号 |
C08G75/02 |
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