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发明名称
RF PLASMA REACTOR
摘要
申请公布号
EP0719447(A1)
申请公布日期
1996.07.03
申请号
EP19940926344
申请日期
1994.09.16
申请人
ISIS INNOVATION LIMITED
发明人
ANNARATONE, BEATRICE, MARIA;ALLEN, JOHN, EDWARD
分类号
H01J37/32;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
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地址
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