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发明名称
APPARATUS FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH08169796(A)
申请公布日期
1996.07.02
申请号
JP19940316154
申请日期
1994.12.20
申请人
SUMITOMO METAL IND LTD
发明人
KUBO TAKAYUKI
分类号
C30B15/10;C30B15/32;C30B29/06;H01L21/208;(IPC1-7):C30B15/32
主分类号
C30B15/10
代理机构
代理人
主权项
地址
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