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发明名称
ELECTRON BEAM FORMING DEVICE OF VARIABLE POLYGONAL SECTION AND ELECTRON BEAM IMAGE DRAWING DEVICE USING IT
摘要
申请公布号
JPH08171880(A)
申请公布日期
1996.07.02
申请号
JP19940314423
申请日期
1994.12.19
申请人
NEC CORP
发明人
MAKISHIMA HIDEO
分类号
G21K5/04;G03F7/20;H01J37/073;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/073
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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