| 摘要 |
The invention relates to a device for the extraction of electrical charge carriers from a charge carrier generation space, comprising at least one electrode assembly for the extraction of charge carriers, the at least one electrode assembly having at least one first grid electrode and a second grid electrode with corresponding orifices. The first and second grid electrode comprise each at least one first electrically conductive grid electrode region, wherein the at least one first grid electrode region of the first grid electrode is formed in a first layer and the at least one first grid electrode region of the second grid electrode is formed in a second layer. The first layer and the second layer are arranged one after the other in the particle outlet direction within the electrode assembly and are spaced apart from one another by a first distance along the particle outlet direction, the at least one first grid electrode region of the first grid electrode forming a first electrically conductive layer portion in the first layer. Moreover, a second electrically conductive layer portion is formed in the first layer, which is electrically insulated from the first layer portion. The second layer portion is formed by at least a second electrically conductive grid electrode region of the first grid electrode or the second grid electrode and the second layer portion is connected in an electrically conductive manner to the at least one first grid electrode region of the second grid electrode. The device for the extraction of charge carriers according to the invention thus provides an electrically switchable extraction grid electrode assembly, by which the beam characteristics of a particle beam of extracted charge carriers can be modified. |
