| 摘要 |
<p>PURPOSE: To make the bubbling as well as cracking and spliting of a work hard by a method wherein a sheet is bent in the first space by the air pressure difference between the first and second spaces oppositely formed holding the sheet so as to slowly bring into contact with a work from the near crest of the bent to the outer periphery. CONSTITUTION: When a work 1 is suction-held by a suction hole 14 of a base member 12 and then a dicing sheet 2 is sticked on a sheet hold ing member 18, the holding member 18, the additive agent layer 2a of the dicing sheet 2 mounted downward on the member 12 to form a space 20. Next, after the formation of another space 24 by mounting a hood member 22 on the member 18, the spaces 20, 24 are simultaneously pressure-reduced through the intermediary of air pressure adjusting holes 16, 26. Next, when the space 24 is slowly fed with air leaving the pressure-reduced state of the space 20 intact, the near crest part in the sectionally curved state of the sheet 2 is brought into contact with the central part of the work 1 to be pressure-sticked by the air pressure difference. Finally, the air pressure difference and the suction of the suction hole 14 are dissolved to relieve the tension of the sheet 2.</p> |
