| 摘要 |
PURPOSE: To obtain a master stamper disk which is entirely free from air bubble defects on the surface of photosetting (2P) resins and is faithfully transferred with rugged patterns of an original mold by adding an adsorbent to the replica resins and using such resins. CONSTITUTION: The 2P resins 3 prepd. by adding the zeolite at a prescribed ratio as the adsorbent to the uncured 2P resins previously subjected to vacuum defoaming are dispensed onto the original mold 1 and glass substrate 2 of the prescribed size and thickness. The original mold 1 and the glass substrate 2 are superposed on each other to spread the 2P resins 3 (a). Next, the 2P resins 3 are irradiated with UV light UV from the glass substrate 2 side and after the 2P resins are sufficiently cured (b), the original mold 1 and the glass substrate 2 are peeled (c). As a result, the high-grade master stamper disk which is entirely free from the air bubble defects on the surface of the cured 2P resins 3 and is faithfully transferred with rugged patterns 1' of the original mold 1 is obtd. |
