| 摘要 |
Embodiments of the present invention provide a MEMS actuator having a substrate, at least one post which is fitted to the substrate, and a deflectable actuator body which is connected to the at least one post via at least one spring, wherein the actuator body, starting from a first position, assumes a second position by means of a tilt-free translatory movement during the action of an electrostatic, electromagnetic or magnetic force, wherein the first position and the second position are different, and wherein, in a plan view of the MEMS actuator, the actuator body is arranged outside an area spanned by the at least one post. |
