| 摘要 |
PURPOSE: To form a thin film of tungsten trioxide, uniform in film thickness and density and free from defects. CONSTITUTION: A mixture of tungsten trioxide powder with 0.5-15.0mol% magnesium oxide or 1.0-10.0mol% dialuminum trioxide is sintered to produce pellets. These pellets are filled into an electron gun and evaporated to form the objective thin film of tungsten trioxide. |
