APPARATUS FOR PRODUCING THIN FILM,申请号JP19940311663-传众专利搜索

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发明名称	APPARATUS FOR PRODUCING THIN FILM
摘要
申请公布号	JPH08170175(A)	申请公布日期	1996.07.02
申请号	JP19940311663	申请日期	1994.12.15
申请人	TOSHIBA CORP	发明人	KOTANI SHIGEO
分类号	C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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